Using MMP for the design and optimization of a phase mask

نویسنده

  • Esteban Moreno Soriano
چکیده

We present the optimization of a transmission grating to be used as a phase mask in photolithography. The electromagnetic fields diffracted by the structure are computed with MMP (Multiple Multipole Method). With this simple procedure a high accuracy and low computation time are achieved.

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تاریخ انتشار 1999